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Strength Reliability of Micro Polycrystalline Silicon Structure

Written By

Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto

Submitted: 18 October 2010 Published: 09 June 2011

DOI: 10.5772/17032

From the Edited Volume

Microsensors

Edited by Igor Minin

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Written By

Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto

Submitted: 18 October 2010 Published: 09 June 2011