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Engineering » Chemical Engineering » "Micromachining Techniques for Fabrication of Micro and Nano Structures", book edited by Mojtaba Kahrizi, ISBN 978-953-307-906-6, Published: February 3, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 12

Integrated MEMS: Opportunities & Challenges

By P.J. French and P.M. Sarro
DOI: 10.5772/31493