Open access

Release Optimization of Suspended Membranes in MEMS

Written By

Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

Submitted: 24 March 2011 Published: 03 February 2012

DOI: 10.5772/30909

From the Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

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Written By

Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

Submitted: 24 March 2011 Published: 03 February 2012