Open access peer-reviewed chapter

Release Optimization of Suspended Membranes in MEMS

By Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

Submitted: March 24th 2011Reviewed: August 23rd 2011Published: February 3rd 2012

DOI: 10.5772/30909

Downloaded: 2571

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal (February 3rd 2012). Release Optimization of Suspended Membranes in MEMS, Micromachining Techniques for Fabrication of Micro and Nano Structures, Mojtaba Kahrizi, IntechOpen, DOI: 10.5772/30909. Available from:

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