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Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

Written By

Arash Tajik and Hamid Jahed

Submitted: 02 March 2011 Published: 28 March 2012

DOI: 10.5772/28725

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Arash Tajik and Hamid Jahed

Submitted: 02 March 2011 Published: 28 March 2012