Open access peer-reviewed chapter

Possibilities for Flexible MEMS: Take Display Systems as Examples

By Cheng-Yao Lo

Submitted: February 11th 2011Reviewed: July 26th 2011Published: March 28th 2012

DOI: 10.5772/26783

Downloaded: 2526

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Cheng-Yao Lo (March 28th 2012). Possibilities for Flexible MEMS: Take Display Systems as Examples, Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/26783. Available from:

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