Open access peer-reviewed chapter

Possibilities for Flexible MEMS: Take Display Systems as Examples

By Cheng-Yao Lo

Submitted: February 11th 2011Reviewed: July 26th 2011Published: March 28th 2012

DOI: 10.5772/26783

Downloaded: 2792

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Cheng-Yao Lo (March 28th 2012). Possibilities for Flexible MEMS: Take Display Systems as Examples, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/26783. Available from:

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