Open access peer-reviewed chapter

Plasma Based Dry Release of MEMS Devices

By Hamood Ur Rahman

Submitted: February 28th 2011Reviewed: August 22nd 2011Published: March 28th 2012

DOI: 10.5772/28420

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Hamood Ur Rahman (March 28th 2012). Plasma Based Dry Release of MEMS Devices, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28420. Available from:

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