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Engineering » Electrical and Electronic Engineering » "Microelectromechanical Systems and Devices", book edited by Nazmul Islam, ISBN 978-953-51-0306-6, Published: March 28, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 13

Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

By Justin R. Serrano and Leslie M. Phinney
DOI: 10.5772/28424