Open access peer-reviewed chapter

Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

By Justin R. Serrano and Leslie M. Phinney

Submitted: February 28th 2011Reviewed: August 18th 2011Published: March 28th 2012

DOI: 10.5772/28424

Downloaded: 1847

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Justin R. Serrano and Leslie M. Phinney (March 28th 2012). Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28424. Available from:

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