Open access peer-reviewed chapter

Optical MEMS

By Wibool Piyawattanametha and Zhen Qiu

Submitted: February 20th 2011Reviewed: January 13th 2012Published: March 28th 2012

DOI: 10.5772/27612

Downloaded: 7709

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Wibool Piyawattanametha and Zhen Qiu (March 28th 2012). Optical MEMS, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/27612. Available from:

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