Open access peer-reviewed chapter

Optical MEMS

By Wibool Piyawattanametha and Zhen Qiu

Submitted: February 20th 2011Reviewed: January 13th 2012Published: March 28th 2012

DOI: 10.5772/27612

Downloaded: 8222

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Wibool Piyawattanametha and Zhen Qiu (March 28th 2012). Optical MEMS, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/27612. Available from:

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