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Engineering » Electrical and Electronic Engineering » "Microelectromechanical Systems and Devices", book edited by Nazmul Islam, ISBN 978-953-51-0306-6, Published: March 28, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 5

MEMS Characterization Based on Optical Measuring Methods

By Tong Guo, Long Ma and Yan Bian
DOI: 10.5772/27524