Open access peer-reviewed chapter

Macromodels of Micro-Electro-Mechanical Systems (MEMS)

By Anatoly Petrenko

Submitted: February 11th 2011Reviewed: June 29th 2011Published: March 28th 2012

DOI: 10.5772/26812

Downloaded: 1883

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Anatoly Petrenko (March 28th 2012). Macromodels of Micro-Electro-Mechanical Systems (MEMS), Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/26812. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1883total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

Related Book

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Edited by Kenichi Takahata

First chapter

Flexible Circuit Technologies for Biomedical Applications

By Damien C. Rodger, Wen Li, James D. Weiland, Mark S. Humayun and Yu-Chong Tai

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,550 Open Access Books

+57,400 Citations in Web of Science

+108,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us