Open access peer-reviewed chapter

Macromodels of Micro-Electro-Mechanical Systems (MEMS)

By Anatoly Petrenko

Submitted: February 11th 2011Reviewed: June 29th 2011Published: March 28th 2012

DOI: 10.5772/26812

Downloaded: 1883

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Anatoly Petrenko (March 28th 2012). Macromodels of Micro-Electro-Mechanical Systems (MEMS), Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/26812. Available from:

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