Open access peer-reviewed chapter

Macromodels of Micro-Electro-Mechanical Systems (MEMS)

By Anatoly Petrenko

Submitted: February 11th 2011Reviewed: June 29th 2011Published: March 28th 2012

DOI: 10.5772/26812

Downloaded: 1949

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Anatoly Petrenko (March 28th 2012). Macromodels of Micro-Electro-Mechanical Systems (MEMS), Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/26812. Available from:

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