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Engineering » Electrical and Electronic Engineering » "Microelectromechanical Systems and Devices", book edited by Nazmul Islam, ISBN 978-953-51-0306-6, Published: March 28, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 9

Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci
DOI: 10.5772/28251