Open access peer-reviewed chapter

Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

Submitted: February 25th 2011Reviewed: July 21st 2011Published: March 28th 2012

DOI: 10.5772/28251

Downloaded: 2035

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci (March 28th 2012). Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration, Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/28251. Available from:

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