Open access peer-reviewed chapter

Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

Submitted: February 25th 2011Reviewed: July 21st 2011Published: March 28th 2012

DOI: 10.5772/28251

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Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci (March 28th 2012). Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28251. Available from:

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