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Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

By T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik

Submitted: March 10th 2011Reviewed: July 25th 2011Published: March 28th 2012

DOI: 10.5772/29671

Downloaded: 7146

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik (March 28th 2012). Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications, Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/29671. Available from:

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