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Engineering » Electrical and Electronic Engineering » "Microelectromechanical Systems and Devices", book edited by Nazmul Islam, ISBN 978-953-51-0306-6, Published: March 28, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 10

Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

By Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin
DOI: 10.5772/29299