Open access

Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

Written By

Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin

Submitted: 07 March 2011 Published: 28 March 2012

DOI: 10.5772/29299

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

Chapter metrics overview

2,592 Chapter Downloads

View Full Metrics

Written By

Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin

Submitted: 07 March 2011 Published: 28 March 2012