Open access peer-reviewed chapter

Advanced Surfactant-Modified Wet Anisotropic Etching

By Bin Tang and Kazuo Sato

Submitted: February 14th 2011Reviewed: May 27th 2011Published: March 28th 2012

DOI: 10.5772/26901

Downloaded: 5134

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Bin Tang and Kazuo Sato (March 28th 2012). Advanced Surfactant-Modified Wet Anisotropic Etching, Microelectromechanical Systems and Devices Nazmul Islam, IntechOpen, DOI: 10.5772/26901. Available from:

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