Open access peer-reviewed chapter

Advanced Surfactant-Modified Wet Anisotropic Etching

By Bin Tang and Kazuo Sato

Submitted: February 14th 2011Reviewed: May 27th 2011Published: March 28th 2012

DOI: 10.5772/26901

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Bin Tang and Kazuo Sato (March 28th 2012). Advanced Surfactant-Modified Wet Anisotropic Etching, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/26901. Available from:

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