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Engineering » Electrical and Electronic Engineering » "Micro Electronic and Mechanical Systems", book edited by Kenichi Takahata, ISBN 978-953-307-027-8, Published: December 1, 2009 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 13

Numerical Simulation of Plasma-Chemical Processing Semiconductors

By Yurii N. Grigoryev and Aleksey G. Gorobchuk
DOI: 10.5772/7012