Open access peer-reviewed chapter

Numerical Simulation of Plasma-Chemical Processing Semiconductors

By Yurii N. Grigoryev and Aleksey G. Gorobchuk

Published: December 1st 2009

DOI: 10.5772/7012

Downloaded: 1736

© 2009 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Yurii N. Grigoryev and Aleksey G. Gorobchuk (December 1st 2009). Numerical Simulation of Plasma-Chemical Processing Semiconductors, Micro Electronic and Mechanical Systems Kenichi Takahata, IntechOpen, DOI: 10.5772/7012. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/micro-electronic-and-mechanical-systems/numerical-simulation-of-plasma-chemical-processing-semiconductors" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1736total chapter downloads

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

By Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny

Related Book

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Edited by Kenichi Takahata

First chapter

Flexible Circuit Technologies for Biomedical Applications

By Damien C. Rodger, Wen Li, James D. Weiland, Mark S. Humayun and Yu-Chong Tai

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,550 Open Access Books

+57,400 Citations in Web of Science

+108,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us