Open access peer-reviewed chapter

Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

By Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny

Published: December 1st 2009

DOI: 10.5772/7013

Downloaded: 5259

© 2009 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny (December 1st 2009). Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering, Micro Electronic and Mechanical Systems, Kenichi Takahata, IntechOpen, DOI: 10.5772/7013. Available from:

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