Open access peer-reviewed Edited Volume

MEMS Sensors

Design and Application

MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.

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MEMS SensorsDesign and ApplicationEdited by Siva Yellampalli

Published: July 18th 2018

DOI: 10.5772/intechopen.71153

ISBN: 978-1-78923-395-7

Print ISBN: 978-1-78923-394-0

Copyright year: 2018

Books open for chapter submissions

1767 Total Chapter Downloads

chaptersDownloads

Open access peer-reviewed

1. Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

By Huiliang Cao and Jianhua Li

258

Open access peer-reviewed

2. Integrated Power Supply for MEMS Sensor

By Hai-peng Liu, Lei Jin, Shi-qiao Gao and Shao-hua Niu

117

Open access peer-reviewed

3. Enzyme Biosensors for Point-of-Care Testing

By Chunxiu Liu, Chenghua Xu, Ning Xue, Jian Hai Sun, Haoyuan Cai, Tong Li, Yuanyuan Liu and Jun Wang

150

Open access peer-reviewed

4. Micropatterning in BioMEMS for Separation of Cells/Bioparticles

By Rajagopal Kumar and Fenil Chetankumar Panwala

189

Open access peer-reviewed

5. Study and Design of Reconfigurable Wireless and Radio- Frequency Components Based on RF MEMS for Low-Power Applications

By Bassem Jmai, Adnen Rajhi, Paulo Mendes and Ali Gharsallah

125

Open access peer-reviewed

6. RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

By Lluis Pradell, David Girbau, Miquel Ribó, Jasmina Casals-Terré, Antonio Lázaro, Adrián Contreras, Marco Antonio Llamas, Julio Heredia, Flavio Giacomozzi and Benno Margesin

249

Open access peer-reviewed

7. MEMS Devices for Miniaturized Gas Chromatography

By Imadeddine Azzouz and Khaldoun Bachari

268

Open access peer-reviewed

8. Milliwatt-Level Electromagnetic Induction-Type MEMS Air Turbine Generator

By Minami Kaneko, Ken Saito and Fumio Uchikoba

130

Open access peer-reviewed

9. MEMS Technologies Enabling the Future Wafer Test Systems

By Bahadir Tunaboylu and Ali M. Soydan

281

Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI
  • IET Inspec

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