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Materials Science » "Materials Science and Technology", book edited by Sabar D. Hutagalung, ISBN 978-953-51-0193-2, Published: March 7, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 3

Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials

By Gert Homm, Steve Petznick, Torsten Henning and Peter J. Klar
DOI: 10.5772/33576