Open access peer-reviewed chapter

Atomic Layer Deposition on Self-Assembled-Monolayers

By Hagay Moshe and Yitzhak Mastai

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Published: June 10th 2013

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Hagay Moshe and Yitzhak Mastai (June 10th 2013). Atomic Layer Deposition on Self-Assembled-Monolayers, Materials Science Yitzhak Mastai, IntechOpen, DOI: 10.5772/54814. Available from:

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