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Engineering » Industrial Engineering and Management » "Manufacturing System", book edited by Faieza Abdul Aziz, ISBN 978-953-51-0530-5, Published: May 16, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 1

Particle Reduction at Metal Deposition Process in Wafer Fabrication

By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff
DOI: 10.5772/38239