Open access peer-reviewed chapter

Particle Reduction at Metal Deposition Process in Wafer Fabrication

By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff

Submitted: June 15th 2011Reviewed: November 10th 2011Published: May 16th 2012

DOI: 10.5772/38239

Downloaded: 10083

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff (May 16th 2012). Particle Reduction at Metal Deposition Process in Wafer Fabrication, Manufacturing System, Faieza Abdul Aziz, IntechOpen, DOI: 10.5772/38239. Available from:

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