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Engineering » Electrical and Electronic Engineering » "Magnetic Sensors - Principles and Applications", book edited by Kevin Kuang, ISBN 978-953-51-0232-8, Published: March 9, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 6

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

By Maria Teresa Todaro, Leonardo Sileo and Massimo De Vittorio
DOI: 10.5772/36468