Open access peer-reviewed chapter

Soft Lithographic Fabrication of Micro Optic and Guided Wave Devices

By Angel Flores and Michael R. Wang

Published: February 1st 2010

DOI: 10.5772/8185

Downloaded: 3276

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Angel Flores and Michael R. Wang (February 1st 2010). Soft Lithographic Fabrication of Micro Optic and Guided Wave Devices, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8185. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/lithography/soft-lithographic-fabrication-of-micro-optic-and-guided-wave-devices" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

3276total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Application of Soft Lithography for Nano Functional Devices

By Shin-Won Kang

Related Book

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More about us