Open access peer-reviewed chapter

Optimal Design and Fabrication of Fine Diffractive Optical Elements Using Proximity Correction with Electron-Beam Lithography

By Masato Okano

Published: February 1st 2010

DOI: 10.5772/8180

Downloaded: 1987

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Masato Okano (February 1st 2010). Optimal Design and Fabrication of Fine Diffractive Optical Elements Using Proximity Correction with Electron-Beam Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8180. Available from:

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