Open access peer-reviewed chapter

Nanoimprint Lithography

By Thomas Glinsner and Gerald Kreindl

Published: February 1st 2010

DOI: 10.5772/8190

Downloaded: 4152

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Thomas Glinsner and Gerald Kreindl (February 1st 2010). Nanoimprint Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8190. Available from:

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