Open access peer-reviewed chapter

Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Published: February 1st 2010

DOI: 10.5772/8189

Downloaded: 14590

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Hongbo Lan and Yucheng Ding (February 1st 2010). Nanoimprint Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8189. Available from:

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