Open access peer-reviewed chapter

Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Published: February 1st 2010

DOI: 10.5772/8178

Downloaded: 1875

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Linjun Wang, Jian Huang, Ke Tang and Yiben Xia (February 1st 2010). Nano-Crystalline Diamond Films for X-ray Lithography Mask, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8178. Available from:

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