Open access peer-reviewed chapter

Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

By N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov

Published: February 1st 2010

DOI: 10.5772/8172

Downloaded: 2270

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov (February 1st 2010). Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8172. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/lithography/manufacturing-and-investigating-objective-lens-for-ultrahigh-resolution-lithography-facilities" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

2270total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Advances in Resist Materials and Processing Technology: Photonic Devices Fabricated by Direct Lithography of Resist/Colloidal Nanocrystals Blend

By Antonio Qualtieri, Tiziana Stomeo, Luigi Martiradonna, Roberto Cingolani and Massimo De Vittorio

Related Book

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More about us