Open access peer-reviewed chapter

Independent-Exposure Method in Electron-Beam Lithography

By Do-Kyun Woo and Sun-Kyu Lee

Published: February 1st 2010

DOI: 10.5772/8181

Downloaded: 2509

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Do-Kyun Woo and Sun-Kyu Lee (February 1st 2010). Independent-Exposure Method in Electron-Beam Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8181. Available from:

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