Open access peer-reviewed chapter

Grazing Incidence Mirrors for EUV Lithography

By Mariana Braic, Mihai Balaceanu and Viorel Braic

Published: February 1st 2010

DOI: 10.5772/8176

Downloaded: 3657

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Mariana Braic, Mihai Balaceanu and Viorel Braic (February 1st 2010). Grazing Incidence Mirrors for EUV Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8176. Available from:

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