Open access peer-reviewed chapter

A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method

By Sang-Kon Kim

Published: February 1st 2010

DOI: 10.5772/8174

Downloaded: 3073

© 2010 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Sang-Kon Kim (February 1st 2010). A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method, Lithography, Michael Wang, IntechOpen, DOI: 10.5772/8174. Available from:

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