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Materials Science » "Ion Implantation", book edited by Mark Goorsky, ISBN 978-953-51-0634-0, Published: May 30, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 9

Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition

By Valery Mikoushkin
DOI: 10.5772/34863