Open access peer-reviewed chapter

Neon and Manganese Ion Implantation into AlInN

By Abdul Majid

Submitted: April 28th 2011Reviewed: October 27th 2011Published: May 30th 2012

DOI: 10.5772/34153

Downloaded: 2145

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Abdul Majid (May 30th 2012). Neon and Manganese Ion Implantation into AlInN, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/34153. Available from:

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