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Lattice Strain Measurements in Hydrogen Implanted Materials for Layer Transfer Processes

Written By

Caroline Moulet and Mark. S. Goorsky

Submitted: 29 June 2011 Published: 30 May 2012

DOI: 10.5772/38713

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Caroline Moulet and Mark. S. Goorsky

Submitted: 29 June 2011 Published: 30 May 2012