Open access peer-reviewed chapter

Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler

Submitted: May 4th 2011Reviewed: October 31st 2011Published: May 30th 2012

DOI: 10.5772/34751

Downloaded: 1477

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Katharina Lorenz and Elke Wendler (May 30th 2012). Implantation Damage Formation in GaN and ZnO, Ion Implantation Mark Goorsky, IntechOpen, DOI: 10.5772/34751. Available from:

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