Open access peer-reviewed chapter

Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

By D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

Submitted: April 28th 2011Reviewed: October 28th 2011Published: May 30th 2012

DOI: 10.5772/34139

Downloaded: 1263

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde (May 30th 2012). Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication, Ion Implantation Mark Goorsky, IntechOpen, DOI: 10.5772/34139. Available from:

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