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Coulomb Heating Behaviour of Fast Light Diclusters in Si<100> Direction

Written By

R. C. Fadanelli, M. Behar and J. F. Dias

Submitted: 13 May 2011 Published: 30 May 2012

DOI: 10.5772/35696

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

R. C. Fadanelli, M. Behar and J. F. Dias

Submitted: 13 May 2011 Published: 30 May 2012