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Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

Written By

Sanjeev Kumar Gupta and Jamil Akhtar

Submitted: 09 November 2010 Published: 10 October 2011

DOI: 10.5772/20465

From the Edited Volume

Silicon Carbide - Materials, Processing and Applications in Electronic Devices

Edited by Moumita Mukherjee

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Written By

Sanjeev Kumar Gupta and Jamil Akhtar

Submitted: 09 November 2010 Published: 10 October 2011