Open access

Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: 11 November 2010 Published: 02 December 2011

DOI: 10.5772/21007

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

Chapter metrics overview

3,189 Chapter Downloads

View Full Metrics

Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: 11 November 2010 Published: 02 December 2011