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Measurement Uncertainty of White-Light Interferometry on Optically Rough Surfaces

Written By

Pavel Pavlíček

Submitted: 09 December 2010 Published: 26 September 2011

DOI: 10.5772/24642

From the Edited Volume

Numerical Simulations of Physical and Engineering Processes

Edited by Jan Awrejcewicz

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Written By

Pavel Pavlíček

Submitted: 09 December 2010 Published: 26 September 2011