Open access

Application of Molecular Dynamics Simulations to Plasma Etch Damage in Advanced Metal-Oxide-Semiconductor Field-Effect Transistors

Written By

Koji Eriguchi

Submitted: 23 May 2011 Published: 11 April 2012

DOI: 10.5772/36394

From the Edited Volume

Molecular Dynamics - Studies of Synthetic and Biological Macromolecules

Edited by Lichang Wang

Chapter metrics overview

3,252 Chapter Downloads

View Full Metrics

Written By

Koji Eriguchi

Submitted: 23 May 2011 Published: 11 April 2012