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Focused Ion Beam Based Three-Dimensional Nano-Machining

Written By

Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: 16 March 2011 Published: 03 February 2012

DOI: 10.5772/30218

From the Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

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Written By

Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: 16 March 2011 Published: 03 February 2012