Open access

Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

Written By

Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen

Submitted: 25 April 2011 Published: 30 May 2012

DOI: 10.5772/33823

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen

Submitted: 25 April 2011 Published: 30 May 2012