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New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

Written By

Ali Yildiz, Cevher Ak and Hüseyin Canbolat

Submitted: 14 October 2011 Published: 14 March 2012

DOI: 10.5772/39116

From the Edited Volume

Electrostatics

Edited by Huseyin Canbolat

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Written By

Ali Yildiz, Cevher Ak and Hüseyin Canbolat

Submitted: 14 October 2011 Published: 14 March 2012